HMDS vacuum coating machine, also known as HMDS substrate pretreatment system, refers to the coating that needs to be carried out under low vacuum. It is mainly used for silicon wafers, gallium arsenide, ceramics, stainless steel, lithium niobate, glass, sapphire, wafer and other materials to improve the surface activity of the substrate before gluing, increase the adhesion between the photoresist and the substrate, and can also be used for cleaning other processes. Especially in the field of chip development and production applications more popular.
1, intelligent control: microcomputer P.I.D controller and intelligent touch screen control system
2, creative process: tempered glass observation window, shell and heating tube are made of stainless steel, in the form of steam coated to the surface of the wafer, can handle more than 4 boxes at a time
3, safe and reliable: closed automatic suction add HMDS gas design, water baking and viscosification (hydrophobic) treatment of one machine to complete without transfer, effectively avoid the risk of leakage, excess gas vacuum pump out to ensure safety
4, temperature control range: RT+10-250℃
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HMDS vacuum coating machine
Dehumidifiers reduce air humidity by cooling the moisture in the air so that it condenses into water droplets. it is suitable for humidcimate, basement, bathroom. kitchen and other humid environment. can effectively prevent mold, bacteria arowth, and improve thecomfort of living and working environment.
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